Izihlungi Ezinkulu Nezisetshenziswa Zokucacisa Okuphezulu Ekukhiqizweni Kwe-Semiconductor
Incazelo
Isihlungi Segesi Esigeleza Kakhulu – Senzelwe ngqo ukuhlunga igesi ngenqubo yobumsulwa obuphezulu kakhulu ekukhiqizweni kwe-semiconductor. Senziwe ngensimbi engagqwali engu-316L, sinomklamo wemidiya yediski enamakholomu amaningi noma ehlanganisiwe ukuqinisekisa ukumelana okuphansi ngamazinga aphezulu okugeleza, kanye nokunemba kokuhlunga okufinyelela ku-0.003μm ukuze kuhlangatshezwane nezidingo zobumsulwa obuphezulu kakhulu. Ukwakhiwa kwensimbi yonke kwenza kube yisisombululo esihle kakhulu sokuhlunga sezindawo ezishintshashintshayo zokushisa okuphezulu.
Isici Somkhiqizo
▶Zonke Izakhiwo Zensimbi Engagqwali Ezingu-316L— Iqinisekisa ukuqina nokumelana nokugqwala.
▶Izinga Lokugeleza Eliphezulu, Ukumelana Okuphansi— Kwenzelwe ukugeleza okuphezulu okunokulahlekelwa okuncane kwengcindezi.
▶Ukusebenza Kahle Kokugcina Izinhlayiya Eziphezulu Kakhulu— Kuhle kakhulu ekugcineni izimo zihlanzekile kakhulu.
▶Imelana namazinga okushisa aphezulu, ingcindezi kanye nokugqwala— Kufanelekela izindawo ezilukhuni.
▶Iyahambisana namagesi ahlukahlukene enqubo— Isebenziseka ngezindlela eziningi zezimboni.
▶Ilungele Ukukhiqiza, Ukuhlola, kanye Nokupakisha Igumbi Lokuhlanza— Ilungele ukusetshenziswa ezindaweni ezilawulwayo.
▶Ukuhlolwa Kobuqotho okungu-100%— Isihlungi ngasinye sihlolwa ubuqotho obuphelele ukuze kuqinisekiswe ikhwalithi.
▶Ukuhlolwa Kokuvuza Kwe-Helium Okuyi-100%— Kuqinisekiswe ngokuhlolwa kokuvuza kwe-helium ukuqinisekisa ukuthembeka kwezicelo ezibalulekile.
Ishidi le-data
Amapharamitha Obuchwepheshe
| Ipharamitha | Imininingwane |
|---|---|
| Izinto Zesihlungi | I-316L yensimbi engagqwali efakwe i-powder |
| Izinto Zendlu | Insimbi engagqwali engu-316L |
| Ukucindezela Okuphezulu Kokungena | Ibha engu-207 |
| Ukucindezela Okuhlukile Kokusebenza Okuphezulu | Ibha engu-5.2 |
| Izinga Lokuvuza Kokuqinisekiswa Kwe-Helium | 2 x 10⁻¹⁰ cc/min |
| Izinga Lokuvuza Lokuhlolwa Kwe-Helium | 1 x 10⁻¹⁰ cc/min |
| Ukwelashwa Okuphezulu | |
| Ubuso Bangaphandle | URa < 1.6 μm |
| Ubuso Bangaphakathi | I-Ra < 0.2 μm |
| Izinga Lokushisa Eliphezulu Lokusebenza | |
| Igesi Engasebenzi | 400-500℃ |
| Igesi Eyonakalisayo Nesabelayo | 50℃ |
| Ukusebenza Kahle Kokugcina Izinhlayiya | ≥99.9999999% (9LVV) @ 30 slpm |
| Ukuhlanzeka Okuphansi | ≤0.03 izinhlayiya/ilitha @ > 0.01 μm, 30 slpm |
| Usayizi Wokugcinwa Kwezinhlayiya | ≥0.003 μm |
Usayizi
Nansi inombolo yengxenye ongayi-oda kanye nemininingwane yosayizi:
| Imodeli Yomkhiqizo | Izinto Zesihlungi | Ukunemba Kokuhlunga (μm) | Uhlobo Lokuxhumeka |
|---|---|---|---|
| Z01B-00647 | Insimbi Engagqwali engu-316L | 10~0.003 | 1/4” |
| Z01B-00648 | Insimbi Engagqwali engu-316L | 10~0.003 | 1/2” |
| Z01B-00649 | Insimbi Engagqwali engu-316L | 10~0.003 | 1/8” |
| Z01B-00650 | Insimbi Engagqwali engu-316L | 10~0.003 | 1” |
| Okungenziwa ngezifiso | Insimbi Engagqwali engu-316L | 10~0.003 | Njengoba Kudingeka |
Izicelo Ezijwayelekile
ezinye izinhlelo zokusebenza ezijwayelekile zeIzihlungi Ezinkulu Zokuhlanzeka Okuphezulu kanye NezinsizafuthiIzihlungi Zomfula Wokugeleza Kwegesi e-Gas Pad:
1. Ukukhiqiza i-Semiconductor
*Iqinisekisa ukutholakala kwegesi emsulwa kakhulu kwezinqubo zokwenziwa kwe-wafer, ukuqopha, kanye nokufakwa komphunga wamakhemikhali (i-CVD).
*Igcina ukuhlanzeka okuphezulu ezinhlelweni zokusatshalaliswa kwegesi ngobuningi ze-nitrogen, i-argon, kanye nezinye izigesi ezithwalayo.
2. Ukukhiqizwa Kwemithi
*Ihlinzeka ngegesi ehlanzekile nengenazinhlayiya ezindaweni ezibalulekile zokukhiqiza.
*Isekela ukuhlunga okuhlanzekile kakhulu kwamakamelo okuhlanza kanye nezindawo ezilawulwayo ukuze kulondolozwe ubuqotho bomkhiqizo.
3. Izinhlelo Zegesi Zelabhorethri
*Kusetshenziswa ezindaweni zelebhu ukuhlanza imifudlana yegesi emishinini yokuhlaziya efana ne-gas chromatography kanye ne-mass spectrometry.
*Kuqinisekisa amagesi ahlanzekile kakhulu ocwaningo nokuhlola izinhlelo zokusebenza, kuvikela amathuluzi abucayi.
4. Ukucubungula Ukudla Neziphuzo
*Ihlunga i-CO₂ kanye namanye amagesi asetshenziswa ekufakweni kwe-carbon, ukupakisha, kanye nokugcina ukudla, igcina ukuphepha kanye nekhwalithi yokudla.
*Kuqinisekisa ukutholakala kwegesi engenakungcola ezindaweni zokucubungula, ikakhulukazi ezikhungweni zegesi eziningi.
5. Imboni Kawoyela Negesi
*Ihlanza imifudlana yegesi yemvelo ekuhlungeni amaphedi egesi, isuse ukungcola ngaphambi kokugcinwa noma ukuthuthwa.
*Kuvikela imishini engezansi komfula ngokususa izinhlayiya, umswakama, kanye nokungcola ezinhlelweni zokugeleza kwegesi ezinomfutho ophezulu.
6. Ukukhiqiza Amakhemikhali
*Ihlunga amagesi awusizo njenge-nitrogen ne-argon asetshenziswa ekwakhiweni nasekusebenzeni kwamakhemikhali.
*Igcina ubumsulwa begesi ukuvimbela ukungcola kanye nokungahambisani kokusabela.
7. Isikhala Sezindiza Nokuzivikela
*Iletha amagesi ahlanzekile kakhulu ezindaweni zokukhiqiza nokuhlola izinto zasemoyeni kanye nezingxenye.
*Kuqinisekisa ukuhlanzeka kwegesi okuqhubekayo ezindaweni ezilawulwayo zokuhlanganisa izindiza nemishini yokuzivikela.
8. Ukukhiqizwa Kwamandla (Izitshalo Zamandla)
*Ihlunga amagesi anomfutho ophezulu ukuze kuphole futhi kucutshungulwe izinhlelo zokusebenza, ikakhulukazi ezindaweni zokushisa okuphezulu.
*Kuthuthukisa ukusebenza kahle futhi kunciphisa ukuguguleka kwemishini ngokuvimbela ukungcola ezinhlelweni zokupholisa nokugeleza kwegesi.
Lezi fAma-ilters abalulekile kunoma yiluphi uhlelo lokusebenza oludinga ukugeleza kwegesi okuhlanzekile nokuqhubekayo, okuthuthukisa ukuvikelwa kwemishini,
ukusebenza kahle kwenqubo, kanye nekhwalithi yokugcina yomkhiqizo kuzo zonke izimboni.
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