Umkhiqizi Wezinto Zokuhlunga Ezihlanzekile Kakhulu Ohlinzeka Ngokulawula Ukugeleza Okunembile Kwezicelo Ze-Fabs Nezindawo Zokuhlanza
Umkhiqizi Wezinto Zokuhlunga Ezihlanzekile Kakhulu Ohlinzeka Ngokulawula Ukugeleza Okunembile
Izicelo ze-Fabs kanye ne-Cleanroom
Incazelo
Izihlungi ze-HENGKO Surface Mount zenzelwe ukuhlangabezana nezidingo ezidingekayo zezinhlelo zegesi ezihlanganisiwe ezisetshenziswa kumathuluzi e-semiconductor OEM. Njengoba zinikeza ukuhlunga okuhamba phambili embonini ku-0.003 µm, lezi zihlungi ziqinisekisa ukusebenza okuhle kakhulu kanye nokuthembeka ngokusebenza kahle kokuvimba izinhlayiya okungu-≥99.9999999% (9-LRV) ku-120 slpm.
Zakhiwe ngempuphu yensimbi engagqwali engu-316L eqinile efakwe i-filter element kanye ne-housing, lezi zihlungi ziyahambisana nemininingwane ye-SEMI F86-0304, equkethe izingxenye ezimbili eziklanyelwe izinhlelo zokusatshalaliswa kwegesi ezingu-1.125” ezine-C-seal configuration. Zisekela ingcindezi ephezulu yokungena engu-3.4 MPa ku-100°C kanye nomehluko omkhulu wengcindezi yokusebenza ongu-0.69 MPa ku-100°C.
Lezi zihlungi ezikhethekile, ezihambisana nezimpawu zesivalo sohlobo lwe-C kanye nohlobo lwe-W, zithola ukuhlanzeka okuphansi ngokukhululwa kwezinhlayiya
Ngokuqedwa kobuso bukaRa< 1.6 µm ngaphandle kanye ne-Ra< 0.13 µm ngaphakathi, zenzelwe ukumelana namazinga okushisa aphezulu afinyelela ku-460°C. Zenzelwe ukuhlanganiswa okulula kanye nokuthuthukiswa komklamo we-modular, lezi zihlungi zenza kube lula ukufakwa nokugcinwa, zisiza ekwenzeni ngcono ukusebenza kwesistimu ekulethweni nasekulawulweni kwezicelo zegesi ze-semiconductor.
Isici Somkhiqizo
▶ Ukwakhiwa kwensimbi engagqwali engu-316L iyonke
▶ Idizayini encane, isakhiwo esincane, ukonga isikhala
▶ Izici ezinhle kakhulu zokufaka esikhundleni igesi kanye nokumuncwa kwayo
▶ Izinga lokushisa eliphezulu, umfutho ophezulu, kanye nokumelana nokugqwala
▶ Indlu yensimbi engagqwali engu-316L epholishwe ngogesi
▶ Ukufakwa nokugcinwa okulula nokuphumelelayo
▶ Ukuvalwa kwemishini, okungashiselwe ngokwesakhiwo ku-medium
Ishidi le-data
| Amapharamitha Obuchwepheshe | Amanani |
|---|---|
| Izinto Zesihlungi | I-316L I-Sintered Powder Yensimbi Engagqwali |
| Izinto Zendlu | Insimbi Engagqwali engu-316L |
| Ukucindezela Okuphezulu Kokungena | 3.4 MPa @ 100°C |
| Umehluko Omkhulu Wokusebenza | 0.69 MPa @ 100°C |
| Izinga Lokuvuza Lokuqinisekiswa Kwe-Helium | 1x10⁻¹¹ cc/min |
| Izinga Lokuvuza Kokuhlolwa Kwe-Helium | 1x10⁻⁹ cc/min |
| Ukwelashwa Okuphezulu | Ingaphandle Langaphandle Ra< 1.6 μm |
| I-Inner Surface Ra< 0.13 μm | |
| Izinga Lokushisa Eliphezulu Lokusebenza | 460°C |
| Ukusebenza Kahle Kokubanjwa Kwezinhlayiyana | ≥99.9999999% (9-LRV) @ 120 slpm (I-MPPS ebhekisela kuzo zonke izinhlayiya) |
| Ukuhlanzeka Okuphansi | Ukukhishwa Kwezinhlayiyana:< 0.03 izinhlayiya/ilitha (< 1 inhlayiya/ft³) |
| Ukuguquguquka:< 10 ppb umswakama | |
| Usayizi Wokubanjwa Kwezinhlayiyana | ≥0.003 μm |
| Ibanga Lokugeleza | 0 ~ 120 slpm |
Usayizi
Nansi inombolo yengxenye ongayi-oda kanye nemininingwane yosayizi:
| Imodeli Yomkhiqizo | Izinga Lokugeleza | Ukuphakama H (mm) | Ukunemba Kokuhlunga | Izinga Lokuhlanza |
|---|---|---|---|---|
| Z01B-00637 | 10 slpm | 51.6 | 0.003 μm | C |
| Z01B-00638 | 40 slpm | 82.9 | 0.003 μm | C |
| Z01B-00687 | 80 slpm | 126.2 | 0.003 μm | C |
| Z01B-00688 | 120 slpm | 167.9 | 0.003 μm | C |
Izicelo Ezijwayelekile
Ukuze kusetshenziswe ne-W-seal kanye ne-C-seal, izinhlelo zokulethwa kwegesi ezihlanganisiwe ezingama-1.125” kanye ne-1.5” ezifakwa ebusweni.
Thumela umlayezo wakho kithi:
