Ukubuka Konke Kokukhiqiza Ama-semiconductor

Imboni ye-semiconductor ihilela izinqubo eziyinkimbinkimbi ezidinga izinto ezihlanzekile kakhulu kanye nokulawulwa okunembile kokungcola.

Ukusetshenziswa kwezihlungi zekhwalithi ephezulu kubalulekile ekugcineni ubuqotho benqubo yokukhiqiza.

Izihlungi zidlala indima ebalulekile ekususeni izinhlayiya, ukungcola kwezinto eziphilayo, kanye nokunye ukungcola okungathinta ikhwalithi yomkhiqizo wokugcina.

Izinyathelo Zokucubungula Ama-semiconductor

Ukucubungula ama-semiconductor kuhilela izinyathelo eziningi, okuhlanganisa ukuhlelwa kwe-chemical mechanical (CMP) ezindaweni ezibushelelezi ze-wafer, i-photolithography, kanye nokufakwa kwefilimu encane.

Isinyathelo ngasinye sidinga izixazululo ezithile zokuhlunga ukuqinisekisa ukususwa kokungcola kanye nokugcinwa kwezimo ezihlanzekile kakhulu. Lokhu kufaka phakathi ukuhlunga ngamakhemikhali kanyeukuhlunga igesiukuqeda ukungcola ngempumelelo.

Ukusetshenziswa kwezihlungi kulezi zinyathelo kusiza ukuvimbela amaphutha nokuqinisekisa ukukhiqizwa kwama-semiconductor asezingeni eliphezulu.

Izixazululo Zokuhlunga Zokukhiqiza Ama-Semiconductor

Izixazululo zokuhlunga zokukhiqiza ama-semiconductor zifaka phakathi izihlungi ze-point-of-use (POU), izihlungi ze-membrane, kanye nezindawo zokuhlunga, ezibalulekile ekususweni kokungcola nokuqinisekisa ukusebenza kahle kokuhlunga. Lezi zixazululo zenzelwe ukuhlinzeka ngokuhlunga okusebenzayo kakhulu, ukwehla kwengcindezi ephansi, kanye nokuphila isikhathi eside. Zisetshenziselwa ukususa izinhlayiya, ukungcola okungokwemvelo, kanye nokunye ukungcola okuvela kuketshezi lwenqubo, amagesi, kanye namakhemikhali. Amanzi amsulwa kakhulu abalulekile ekugcineni izimo zobumsulwa obuphezulu, ikakhulukazi ekuhlanzeni i-chemistry yenqubo kusuka kuma-wafers kanye nokuhlanza amakhemikhali enqubo agxilile.

Ukuhlunga Okusebenza Kakhulu Ekucubungulweni Kwe-Semiconductor

Ukusebenza kokuhlunga kubalulekile ekucutshungulweni kwe-semiconductor ukuqinisekisa ukususwa kwezinhlayiya ezingcolisayo kanye nokugcinwa kwezimo ezingenazinhlayiya nezihlanzekile kakhulu.

Izihlungi ezinokugcinwa kwezinhlayiya okuphezulu, ukuvuleka, kanye nobumsulwa zisetshenziselwa ukuhlinzeka ngokuvikelwa okuphezulu kwezinqubo zokukhiqiza ze-semiconductor.

Lezi zihlungi zenzelwe ukunikeza impilo yesevisi ende nokunciphisa isidingo sokushintsha njalo.

Izinhlobo Zezihlungi Ze-Semiconductor

Izihlungi ze-semiconductorzibalulekile enqubweni yokukhiqiza i-semiconductor, njengoba zisiza ekugcineniubumsulwa bamagesi, uketshezi, kanye nezinye izinto ezisetshenziswa ekukhiqizeni. Zivimbela ukungcola ukuthi kuphazamise izinto ezibucayi kanye nezinqubo ekwakhiweni kwe-semiconductor. Nazi ezinye izinhlobo zezihlungi ze-semiconductor ezivame ukusetshenziswa embonini:

1. Izihlungi Zensimbi Ezihlanganisiwe

Zenziwe ngezinto ezifana nensimbi engagqwali, lezi zihlungi zinezimbobo ezincane ezenziwe yi-izimpushana zensimbi ezisilayoZisetshenziselwa ukuhlunga izinhlayiya eziqinile ezivela kumagesi noma uketshezi, okuqinisekisa indawo ehlanzekile yokwenziwa kwe-semiconductor.

Izicelo:Isetshenziselwa ukuhlunga igesi ehlanzekile kakhulu, njenge-nitrogen noma i-argon, kanye nasezinhlelweni ze-vacuum eziphezulu kakhulu.

2. Izihlungi ze-PTFE (Polytetrafluoroethylene)

Izihlungi ze-PTFE zimelana kakhulu namakhemikhali futhi zingaphatha izinto ezihlaselayo. Zivame ukusetshenziswa ku-semiconductorimboni yokuhlungaamagesi agqwalisayo kanye noketshezi.

Izicelo:Ngokuvamile isetshenziswa ekufakweni komphunga wamakhemikhali (i-CVD) kanye nezinqubo zokuqopha.

3. Izihlungi ze-Ceramic

Izihlungi ze-ceramic zivame ukusetshenziswa ezindaweni lapho amazinga okushisa aphezulu ehilelekile.enezimboboUkwakheka kwezihlungi ze-ceramic kuvumela ukuhlunga okuphumelelayo ngaphandle kokubeka engcupheni ubumsulwa bezinto ezihlungwayo.

Izicelo:Isetshenziselwa izinqubo zokushisa okuphezulu, njengasekucubunguleni ama-ion asabelayo (RIE) noma ekucubunguleni ama-plasma.

4. Izihlungi ze-HEPA (ezisebenza kahle kakhulu emoyeni)

Lezi zihlungi zenzelwe ukubamba izinhlayiya ezincane kakhulu, ngokuvamile ezifinyelela ku-0.3ama-micronEmakamelweni ahlanzekile e-semiconductor, izihlungi ze-HEPA zibalulekile ekugcineni izindawo ezihlanzekile kakhulu.

Izicelo:Isetshenziswa emakamelweni ahlanzekile futhi njengengxenye yezinhlelo ze-HVAC kuma-semiconductor fabs.

5. Izihlungi zekhabhoni ezisebenzayo

Izihlungi zekhabhoni ezisebenzayo zisetshenziselwa ukumunca amagesi kanye nomhwamuko, okuhlanganisa ama-volatile organic compounds (ama-VOC) kanye nezinye izinto ezingcolisayo.

Izicelo:Ngokuvamile kutholakala ezinhlelweni zokukhipha umoya noma ezinqubweni lapho umoya kufanele uhlanzwe khona kumakhemikhali angcolile.

6. Izihlungi Eziphelele

Lezi zihlungi zilinganiselwe ukubamba zonke izinhlayiya ezingaphezu kosayizi othile ngokusebenza kahle kakhulu. Zivame ukusetshenziselwa izigaba zokugcina zokuhlunga, ukuqinisekisa ukuthi akukho ukungcola okudlulayo.

Izicelo:Isetshenziswa ekuhlungeni kwesigaba sokugcina koketshezi olucwengekile kakhulu kanye namagesi ekukhiqizweni kwe-semiconductor.

7. Izihlungi ze-Electrostatic

Lezi zihlungi zisebenzisa amashaji kagesi ukuze zibambe izinhlayiya ezincane kakhulu ukuze zihlungwe ngomshini kuphela. Zisebenza kahle ekuhlungeni uthuli olucolekile ngisho nomhwamuko othile.

Izicelo:Kusetshenziswa ezindaweni lapho izinhlayiya ezincane noma ama-aerosol kudingeka abanjwe khona kahle.

8. Izihlungi zesigaba segesi

Lezi zihlungi zisetshenziselwa ngqo ukuhlunga igesi, ngokuvamile ezindaweni lapho ubumsulwa bubaluleke kakhulu khona. Zingasusa izinto ezincane, ama-VOC, kanye nezinye izinto ezingcolisayo ezivela kumagesi asetshenziswa ekwakhiweni kwe-semiconductor.

Izicelo:Kusetshenziswa ezinhlelweni zokulethwa kwegesi ezinqubweni ezifana ne-photolithography noma ukufakwa komphunga wamakhemikhali.

Ukukhethwa kwesihlungi esifanele kuncike ohlotsheni lwendawo ehlungwayo, izinto ezithile ezingcolisayo okufanele zisuswe, kanye nezimo zokusebenza (izinga lokushisa, ingcindezi, kanye nokuhambisana kwamakhemikhali).

9. Izicelo Zokuhlunga Ezikhethekile

Imboni ye-semiconductor iyaqhubeka nokuguquka, futhiubuchwepheshe bokuhlungaziyathuthuka ukuhlangabezana nezidingo zokukhiqiza kwesizukulwane esilandelayo. Ubuchwepheshe bokuhlunga obusha, njengokuhlunga okuncane kanye nezihlungi ze-membrane ezithuthukisiwe, bunikeza ukusebenza kahle kanye nokusebenza kahle okuthuthukisiwe ekususeni ukungcola. Lezi zixazululo ezisezingeni eliphezulu zivumela ukukhiqizwa kwamakhemikhali namagesi ahlanzekile kakhulu, abalulekile ekucutshungulweni kwe-semiconductor. Ngokufaka lobu buchwepheshe bokuhlunga obuthuthukisiwe, abakhiqizi bangafinyelela isivuno esiphezulu, amazinga aphansi okukhubazeka, kanye nokukhiqiza okwandisiwe. Njengoba imboni iqhubeka nokuthuthuka, ukuthuthukiswa kobuchwepheshe obusha bokuhlunga kuzodlala indima ebalulekile ekwenzeni ukukhiqizwa kwama-semiconductor amancane, asheshayo, futhi anamandla kakhulu.

Umthelela Wezinhlelo Zokuhlunga Emvelweni

Izinhlelo zokuhlunga ezisetshenziswa ekukhiqizeni ama-semiconductor zingaba nomthelela omkhulu emvelweni, ikakhulukazi maqondana nokusetshenziswa kwamandla kanye nokukhiqizwa kwemfucuza. Ukusetshenziswa kwezixazululo zokuhlunga ezisebenza kahle kakhulu kungasiza ekunciphiseni ukusetshenziswa kwamandla futhi kunciphise ukukhiqizwa kwemfucuza. Ukukhetha izindlu zokuhlunga ezinobungani nemvelo, njengalezo ezenziwe nge-polyethylene enobuningi obukhulu, kungasiza futhi ekunciphiseni umthelela wemvelo wezinhlelo zokuhlunga. Ngaphezu kwalokho, ukusetshenziswa kwamanzi ahlanzekile kakhulu ekukhiqizeni ama-semiconductor kungasiza ekunciphiseni inani lamanzi angcolile akhiqizwayo. Ngokusebenzisa izinhlelo zokuhlunga ezinobungani nemvelo, abakhiqizi be-semiconductor banganciphisa ukunyathela kwabo emvelweni futhi banikele ekusaseni elihlala isikhathi eside.

Ukuhlaziywa Kwezindleko Nezinzuzo Zezinhlelo Zokuhlunga

Ukuhlaziywa kwezindleko nezinzuzo zezinhlelo zokuhlunga ekukhiqizweni kwe-semiconductor kubalulekile ekuqinisekiseni ukuthi izinzuzo zokuhlunga zidlula izindleko. Izixazululo zokuhlunga ezisebenza kahle kakhulu zingaholela ekongeni okukhulu kwezindleko ngokunciphisa isidingo sokushintsha izihlungi njalo nokunciphisa isikhathi sokungasebenzi. Ukukhetha izindlu zezihlungi ezinempilo ende yesevisi kungasiza futhi ukunciphisa izindleko zokulungisa nokwandisa impilo yesistimu yokuhlunga. Ngaphezu kwalokho, ukusetshenziswa kwezinhlelo zokuhlunga kungasiza ekunciphiseni izindleko zokulahla imfucuza nokunciphisa umthelela wemvelo wokukhiqiza i-semiconductor. Ngokwenza ukuhlaziywa okujulile kwezindleko nezinzuzo, abakhiqizi be-semiconductor bangaqinisekisa ukuthi izinhlelo zabo zokuhlunga zilungiselelwe ukusebenza kahle kakhulu kanye nokusebenza kahle kwezindleko.

Izindawo Zokuhlunga kanye Nezihlungi Zesevisi Ejwayelekile

Izinhlelo zokuhlunga zenzelwe ukuhlinzeka ngendlela ephephile nethembekile yokufaka nokusebenzisa izihlungi ezinqubweni zokukhiqiza ze-semiconductor, ukuqinisekisa ukunciphisa ukungcola okusebenzayo. Ama-silicon wafers adlala indima ebalulekile kulo mkhakha, njengoba ebalulekile ekukhiqizeni ama-semiconductor kanye nezibonisi, okudinga ukunciphisa ukungcola okusebenzayo kanye nokuqinisekiswa kwekhwalithi. Izihlungi zesevisi ezijwayelekile zenzelwe ukuhlinzeka ngesisombululo esingabizi kakhulu sezinhlelo zokuhlunga ezilula neziyinkimbinkimbi. Zisetshenziselwa ukuhlinzeka ngenqubo yokuhlunga ethembekile ngaphandle kokuchitha imali eningi.

Ukuthuthukisa Ukusebenza Kahle Kokukhiqiza Ama-Semiconductor

Ukusetshenziswa kwezihlungi ezisezingeni eliphezulu kanye nezixazululo zokuhlunga kungasiza ekuthuthukiseni ukusebenza kahle kokukhiqiza kwe-semiconductor. Ukusebenzisa ubuchwepheshe bokuhlunga obuthuthukisiwe kanye nokuphathwa kokungcola okuphumelelayo kungathuthukisa kakhulu ukusebenza kahle okuphelele. Lezi zixazululo zokuhlunga zibalulekile ezinhlelweni ezahlukahlukene, kufaka phakathi amasekethe ahlanganisiwe, ukuze kunikezwe imiphumela emihle kakhulu kanye nokonga izindleko embonini.

Ngokususa ukungcola nokugcina izimo zokuhlanzeka okuphezulu, izihlungi zingasiza ekunciphiseni amaphutha nokuthuthukisa isivuno.

Ukusetshenziswa kwezihlungi kungasiza futhi ekunciphiseni isidingo sokushintsha njalo nokunciphisa isikhathi sokungasebenzi.